Achievement of Highly Flat Edge with Double-Layered Polishing Pad (Improvement of Edge Flatness with Softening Upper Layer)

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ژورنال

عنوان ژورنال: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C

سال: 2012

ISSN: 0387-5024,1884-8354

DOI: 10.1299/kikaic.78.669